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1.发明授权Apparatus for monitoring deposition rate, apparatus provided with the same for depositing organic layer, method of monitoring deposition rate, and method of manufacturing organic light emitting display apparatus using the same 有权用于监测沉积速率的装置，用于沉积有机层的装置，用于监测沉积速率的方法，以及使用其制造有机发光显示装置的方法公开(公告)号：US09347886B2
公开(公告)日：2016-05-24
申请号：US14079522
申请日：2013-11-13
发明人： Alexander Voronov , Dmitry Maslov , Gyoo-Wan Han
CPC分类号： G01N21/6489 , C23C14/24 , C23C14/547 , C23C14/568
摘要： An apparatus for monitoring deposition rate, an apparatus including the same, for depositing an organic layer, a method of monitoring deposition rate, and a method of manufacturing an organic light emitting display apparatus using the same, are provided. The deposition rate monitoring apparatus for measuring deposition rate of a deposition material discharged from a deposition source, includes: a light source for irradiating light having a wavelength within a photoexcitation bandwidth of the deposition material; a first optical system for irradiating the light emitted from the light source toward the discharged deposition material; a second optical system for collecting the light emitted from the deposition material; and a first light sensor for detecting the amount of the light which is emitted from the deposition material and collected in the second optical system.
摘要翻译： 提供了一种用于监测沉积速率的装置，包括其的装置，用于沉积有机层，监测沉积速率的方法，以及制造使用其的有机发光显示装置的方法。 用于测量从沉积源排出的沉积材料的沉积速率的沉积速率监测装置包括：用于照射具有在沉积材料的光激发带宽内的波长的光的光源; 第一光学系统，用于将从光源发射的光朝向排出的沉积材料照射; 用于收集从沉积材料发射的光的第二光学系统; 以及第一光传感器，用于检测从沉积材料发射并收集在第二光学系统中的光量。
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2.发明申请APPARATUS FOR MONITORING DEPOSITION RATE, APPARATUS PROVIDED WITH THE SAME FOR DEPOSITING ORGANIC LAYER, METHOD OF MONITORING DEPOSITION RATE, AND METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY APPARATUS USING THE SAME 有权用于监测沉积速率的装置，用于沉积有机层的装置，监测沉积速率的方法，以及使用该方法制造有机发光显示装置的方法公开(公告)号：US20140377890A1
公开(公告)日：2014-12-25
申请号：US14079522
申请日：2013-11-13
发明人： Alexander Voronov , Dmitry Maslov , Gyoo-Wan Han
CPC分类号： G01N21/6489 , C23C14/24 , C23C14/547 , C23C14/568
摘要： An apparatus for monitoring deposition rate, an apparatus including the same, for depositing an organic layer, a method of monitoring deposition rate, and a method of manufacturing an organic light emitting display apparatus using the same, are provided. The deposition rate monitoring apparatus for measuring deposition rate of a deposition material discharged from a deposition source, includes: a light source for irradiating light having a wavelength within a photoexcitation bandwidth of the deposition material; a first optical system for irradiating the light emitted from the light source toward the discharged deposition material; a second optical system for collecting the light emitted from the deposition material; and a first light sensor for detecting the amount of the light which is emitted from the deposition material and collected in the second optical system.
摘要翻译： 提供了一种用于监测沉积速率的装置，包括其的装置，用于沉积有机层，监测沉积速率的方法，以及制造使用其的有机发光显示装置的方法。 用于测量从沉积源排出的沉积材料的沉积速率的沉积速率监测装置包括：用于照射具有在沉积材料的光激发带宽内的波长的光的光源; 第一光学系统，用于将从光源发射的光朝向排出的沉积材料照射; 用于收集从沉积材料发射的光的第二光学系统; 以及第一光传感器，用于检测从沉积材料发射并收集在第二光学系统中的光量。
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