SUBSTRATE LOADING APPARATUS
    2.
    发明申请

    公开(公告)号:US20250024941A1

    公开(公告)日:2025-01-23

    申请号:US18738525

    申请日:2024-06-10

    Abstract: Provided is a substrate loading apparatus including a first frame and a second frame, a support frame and including a front surface adjacent to a substrate and a rear surface facing the front surface, and a support bar coupled to the support frame, extending in a second direction, and supporting the substrate. The support bar includes an extension member and a coupling member configured to couple the extension member and the support frame to each other. The coupling member includes a first surface which protrudes toward the support frame and is a curved surface having a first curvature. The support frame includes a second surface which faces the first surface and is a curved surface having the first curvature of the first surface. The first surface and the second surface may be in surface contact with each other.

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