公开(公告)号：US20150060784A1

公开(公告)日：2015-03-05

申请号：US14253726

申请日：2014-04-15

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Sun Hee Lee ,  Young Gug Seol ,  Ju Chan Park ,  Jin Woo Lee ,  Pil Suk Lee ,  Hui Ying Li

IPC: H01L27/32 ,  H01L51/56

CPC classification number: H01L27/3244 ,  H01L27/1248 ,  H01L27/127 ,  H01L2227/323 ,  H01L2251/5338

Abstract: A method of manufacturing an organic light emitting display includes: patterning an amorphous silicon layer to form an amorphous silicon layer pattern; forming an insulating layer on the amorphous silicon layer pattern; forming a gate electrode on a part of the insulating layer which corresponds to the amorphous silicon layer pattern; forming a blocking film on the gate electrode and the insulating layer; doping an impurity in a part of the amorphous silicon layer pattern; annealing the amorphous silicon layer pattern on which the impurity is doped to form a semiconductor layer; removing the blocking film; etching the insulating layer using the gate electrode as a mask to form a gate insulating layer below the gate electrode; forming an interlayer insulating layer using an organic insulator on a buffer layer, the gate electrode, and the semiconductor layer.

Abstract translation: 制造有机发光显示器的方法包括：图案化非晶硅层以形成非晶硅层图案; 在所述非晶硅层图案上形成绝缘层; 在对应于非晶硅层图案的绝缘层的一部分上形成栅电极; 在栅电极和绝缘层上形成阻挡膜; 在非晶硅层图案的一部分掺杂杂质; 对其上掺杂有杂质的非晶硅层图案退火以形成半导体层; 去除阻挡膜; 使用栅电极作为掩模蚀刻绝缘层，以在栅电极下方形成栅极绝缘层; 在缓冲层，栅电极和半导体层上使用有机绝缘体形成层间绝缘层。