公开(公告)号：US20140000792A1

公开(公告)日：2014-01-02

申请号：US14019979

申请日：2013-09-06

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jung-Woo KO ,  Ikunori KOBAYASHI ,  Sang-Shin LEE

IPC: B05C21/00

CPC classification number: C23C14/042 ,  B05C21/005 ,  Y10T156/10

Abstract: A mask assembly, a deposition apparatus for flat panel displays including the same, and associated methods, the mask assembly including an open mask having a plurality of first openings, and a pattern mask coupled to the open mask, the pattern mask having a plurality of second openings disposed within an area bounded by the first openings, wherein the open mask is formed of a material having a thermal expansion coefficient that is lower than a thermal expansion coefficient of the pattern mask.

Abstract translation: 掩模组件，包括其的平板显示器的沉积装置和相关方法，所述掩模组件包括具有多个第一开口的开口掩模和耦合到所述开口掩模的图案掩模，所述图案掩模具有多个 第二开口设置在由第一开口限定的区域内，其中，开口掩模由热膨胀系数低于图案掩模的热膨胀系数的材料形成。