公开(公告)号：US11534790B2

公开(公告)日：2022-12-27

申请号：US15806609

申请日：2017-11-08

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Sangjin Han ,  Eugene Kang ,  Junha Park ,  Mingyu Seo ,  Youjong Lee ,  Jongbun Han ,  Euna Ko ,  Sungjong Park

IPC: B05B15/68 ,  B05B13/00 ,  B05D1/02 ,  C23C16/458 ,  C23C16/455 ,  C23C14/24 ,  C23C14/54 ,  C23C14/50 ,  C23C16/448 ,  C23C14/04 ,  C23C14/12 ,  C23C16/44 ,  C23C16/46 ,  H01L51/00

Abstract: An apparatus for manufacturing a display apparatus includes a deposition source, a nozzle head, a substrate fixer, and a deposition preventer. The deposition source is outside the chamber and vaporizes or sublimates a deposition material. The nozzle head is in the chamber, is connected to the at least one deposition source, and simultaneously sprays the deposition material onto an entire surface of a display substrate. The substrate fixer is connected to the chamber and moves linearly, with the display apparatus is mounted on the substrate fixer. The deposition preventer is in the chamber surrounding an edge portion of the nozzle head and an edge portion of the substrate fixer. The deposition preventer is heated during a deposition process.