公开(公告)号：US20140315343A1

公开(公告)日：2014-10-23

申请号：US14021717

申请日：2013-09-09

Applicant: Samsung Display Co., Ltd.

Inventor： Ki-Hyun KIM

IPC: H01L51/56

CPC classification number: C23C14/042 ,  C23C14/12 ,  C23C14/24 ,  C23C14/50 ,  C23C14/562 ,  C23C16/042 ,  H01L51/0011

Abstract: A thin film deposition apparatus includes: a process chamber; and a substrate support comprising a substantially flat surface configured to support a substrate in the process chamber; and a deposition source configured to supply an organic material for deposition onto the substrate. The apparatus further includes a deposition mask assembly comprising first and second rollers disposed apart from each other in the process chamber; a thin film mask roll having a first end wound about the first roller and a second end wound about the second roller, wherein a deposition mask is defined on a first plane with a portion of the thin film mask roll extending between the first and second rollers; and a substrate transporting mechanism configured to transfer the substrate support on a second plane substantially parallel to the first plane within the process chamber.

Abstract translation: 薄膜沉积设备包括：处理室; 以及衬底支撑件，其包括构造成在所述处理室中支撑衬底的基本上平坦的表面; 以及沉积源，其构造成将用于沉积的有机材料供应到所述基板上。 该设备还包括沉积掩模组件，其包括在处理室中彼此分开布置的第一和第二辊; 薄膜掩模辊，其具有围绕第一辊缠绕的第一端和缠绕在第二辊上的第二端，其中沉积掩模限定在第一平面上，薄膜掩模辊的一部分在第一和第二辊之间延伸 ; 以及基板输送机构，其构造成将基板支撑件在大致平行于处理室内的第一平面的第二平面上转印。

公开(公告)号：US20140307080A1

公开(公告)日：2014-10-16

申请号：US14056191

申请日：2013-10-17

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Ki-Hyun KIM ,  Young-Gil PARK ,  Shang-U KIM ,  Ki-Won OH

IPC: G01N21/95

CPC classification number: G01N21/95 ,  G01N21/8806 ,  G01N21/94 ,  G01N21/9501 ,  G01N2021/8848

Abstract: A sample inspection apparatus is provided. A sample inspection apparatus according to an exemplary embodiment of the present invention includes a base; a loading portion installed on the base so that a sample is placed thereon; a first light source radiating light on the sample, the sample being placed on the loading portion; a first light receiving portion located at a first position and receiving light reflected and scattered by the sample; and a support portion positioned on the loading portion so that the first light source and the first light receiving portion are movably installed on the support portion.

Abstract translation: 提供样品检查装置。 根据本发明的示例性实施例的样本检查装置包括基座; 安装在基座上的装载部分，使样品放置在其上; 在样品上照射光的第一光源，样品被放置在装载部分上; 第一光接收部分，位于第一位置并接收被样品反射和散射的光; 以及支撑部，其位于所述装载部上，使得所述第一光源和所述第一光接收部可移动地安装在所述支撑部上。

公开(公告)号：US20140183635A1

公开(公告)日：2014-07-03

申请号：US14013205

申请日：2013-08-29

Applicant: Samsung Display Co., Ltd.

Inventor： Ki-Hyun KIM

IPC: H01L29/786 ,  H01L29/66

CPC classification number: H01L29/78696 ,  H01L27/1292 ,  H01L29/42384 ,  H01L29/66742 ,  H01L29/78603 ,  H01L29/78636

Abstract: A thin film transistor including a first insulating layer disposed on a substrate and having a first hole; a second insulating layer disposed on the substrate and having a second hole; a gate insulating layer disposed between the first and second insulating layers; a gate electrode formed in the first hole; a source electrode and second drain electrode formed at both sides of an inner portion of the second hole; and an activated layer formed between the source electrode and the second drain electrode of the inner portion of the second hole, and having a planarization layer.

Abstract translation: 一种薄膜晶体管，包括设置在基板上并具有第一孔的第一绝缘层; 设置在所述基板上并具有第二孔的第二绝缘层; 设置在所述第一和第二绝缘层之间的栅极绝缘层; 形成在所述第一孔中的栅电极; 源电极和第二漏电极，形成在第二孔的内部的两侧; 以及形成在第二孔的内部的源电极和第二漏电极之间并具有平坦化层的活化层。