公开(公告)号：US20230201969A1

公开(公告)日：2023-06-29

申请号：US18111940

申请日：2023-02-21

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Sung Yong LEE ,  Toshinaru SUZUKI ,  Seung Ho MYOUNG ,  Gyeong Hee HAN ,  Gyoo Wan HAN

IPC: B23K26/38 ,  B23K26/70 ,  B23K26/12 ,  B23K101/40

CPC classification number: B23K26/38 ,  B23K26/706 ,  B23K26/1224 ,  B23K26/127 ,  B23K2101/40

Abstract: A laser apparatus includes: a first vacuum chamber, wherein machining is performed on a target substrate in the first vacuum chamber; a laser facing the first vacuum chamber; a carrier disposed in the first vacuum chamber, wherein the target substrate is seated on the carrier; a chamber window disposed in one surface of the first vacuum chamber, wherein a laser beam emitted by the laser passes through the chamber window; a first protection window positioned between the carrier and the chamber window; a second vacuum chamber disposed at a first side of the first vacuum chamber; and a transfer unit configured to transfer the first protection window to the second vacuum chamber.

公开(公告)号：US20250025964A1

公开(公告)日：2025-01-23

申请号：US18906406

申请日：2024-10-04

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Sung Yong LEE ,  Toshinaru SUZUKI ,  Seung Ho MYOUNG ,  Gyeong Hee HAN ,  Gyoo Wan HAN

IPC: B23K26/38 ,  B23K26/12 ,  B23K26/70 ,  B23K101/40

Abstract: A laser apparatus includes: a first vacuum chamber, wherein machining is performed on a target substrate in the first vacuum chamber; a laser facing the first vacuum chamber; a carrier disposed in the first vacuum chamber, wherein the target substrate is seated on the carrier; a chamber window disposed in one surface of the first vacuum chamber, wherein a laser beam emitted by the laser passes through the chamber window; a first protection window positioned between the carrier and the chamber window; a second vacuum chamber disposed at a first side of the first vacuum chamber; and a transfer unit configured to transfer the first protection window to the second vacuum chamber.

公开(公告)号：US20240347365A1

公开(公告)日：2024-10-17

申请号：US18515267

申请日：2023-11-21

Applicant: Samsung Display Co., LTD.

Inventor： Suk Beom YOU ,  Sung Yong LEE ,  Dong Hyun KIM ,  Myung Kyu KIM

IPC: H01L21/683 ,  H01L21/687

CPC classification number: H01L21/6833 ,  H01L21/68735

Abstract: Provided are an electrostatic chuck, a deposition apparatus including the same, and a display panel fabricated using the same. According to an aspect, there is provided an electrostatic chuck including, a body, and a tension assist device disposed at a border of the body, the tension assist device includes a stepped portion disposed on a side of the body, and an end of the stepped portion is disposed higher than an upper surface of the body.

公开(公告)号：US20210053159A1

公开(公告)日：2021-02-25

申请号：US16862815

申请日：2020-04-30

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Sung Yong LEE ,  Toshinaru SUZUKI ,  Seung Ho MYOUNG ,  Gyeong Hee HAN ,  Gyoo Wan HAN

IPC: B23K26/38 ,  B23K26/70 ,  B23K26/12

Abstract: A laser apparatus includes: a first vacuum chamber, wherein machining is performed on a target substrate in the first vacuum chamber; a laser facing the first vacuum chamber; a carrier disposed in the first vacuum chamber, wherein the target substrate is seated on the carrier; a chamber window disposed in one surface of the first vacuum chamber, wherein a laser beam emitted by the laser passes through the chamber window; a first protection window positioned between the carrier and the chamber window; a second vacuum chamber disposed at a first side of the first vacuum chamber; and a transfer unit configured to transfer the first protection window to the second vacuum chamber.