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公开(公告)号:US09383651B2
公开(公告)日:2016-07-05
申请号:US14189663
申请日:2014-02-25
发明人: Hi Kuk Lee , Tsunemitsu Torigoe , Chang Hoon Kim , Ki Beom Lee , Su-Yeon Sim , Sang Hyun Lee
IPC分类号: G03F7/20
CPC分类号: G03F7/70158 , G03F7/70291
摘要: In an aspect, a grating light valve module including: a substrate; and a plurality of ribbons disposed on the substrate, wherein each of the ribbons includes an insulating layer, a conductive layer disposed on the insulating layer, and an anti-oxidation layer disposed on the conductive layer is provided.
摘要翻译: 一方面,一种光栅光阀模块,包括:基板; 以及设置在基板上的多个带,其中每个带包括绝缘层,设置在绝缘层上的导电层和设置在导电层上的抗氧化层。
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公开(公告)号:US20140340662A1
公开(公告)日:2014-11-20
申请号:US14189663
申请日:2014-02-25
发明人: Hi Kuk Lee , Tsunemitsu Torigoe , Chang Hoon Kim , Ki Beom Lee , Su-Yeon Sim , Sang Hyun Lee
IPC分类号: G03F7/20
CPC分类号: G03F7/70158 , G03F7/70291
摘要: In an aspect, a grating light valve module including: a substrate; and a plurality of ribbons disposed on the substrate, wherein each of the ribbons includes an insulating layer, a conductive layer disposed on the insulating layer, and an anti-oxidation layer disposed on the conductive layer is provided.
摘要翻译: 一方面,一种光栅光阀模块,包括:基板; 以及设置在基板上的多个带,其中每个带包括绝缘层,设置在绝缘层上的导电层和设置在导电层上的抗氧化层。
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