公开(公告)号：US20150129000A1

公开(公告)日：2015-05-14

申请号：US14463848

申请日：2014-08-20

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Seok Jun JANG ,  Bong Kyun Kim ,  Yang II Jeon

IPC: B08B3/02

CPC classification number: B08B3/022 ,  G02F2001/1316 ,  H01L21/67051 ,  H01L21/67706 ,  H01L21/67712 ,  H01L21/67718 ,  H01L21/6776

Abstract: An apparatus for cleaning a substrate includes a substrate transferring unit configured to support a substrate at a polar angle from a first direction, and transfer the substrate along a second direction orthogonal to the first direction. A cleaning unit is disposed on the substrate transferring unit. The cleaning unit includes a plurality of two-fluid nozzles. The cleaning unit has an azimuth angle from the first direction. The two-fluid nozzles mix a cleaning solution and compressed gas together and spray the mixture.

Abstract translation: 一种用于清洗基板的设备包括：基板传送单元，被配置为从第一方向以极角支撑基板，并沿着与第一方向正交的第二方向传送基板。 清洁单元设置在基板传送单元上。 清洁单元包括多个双流体喷嘴。 清洁单元具有从第一方向的方位角。 双流体喷嘴将清洁溶液和压缩气体混合在一起并喷雾混合物。