公开(公告)号：US12028045B2

公开(公告)日：2024-07-02

申请号：US17315577

申请日：2021-05-10

Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.

Inventor： Tae Kyung Lee ,  Chan Hee Park ,  Jae Goon Aum

IPC: H03H9/205 ,  H03H9/02 ,  H03H9/13 ,  H03H9/54

CPC classification number: H03H9/205 ,  H03H9/02015 ,  H03H9/02157 ,  H03H9/131 ,  H03H9/54

Abstract: A bulk acoustic resonator filter includes: a series bulk acoustic resonator electrically connected, in series, between first and second ports through which a radio frequency (RF) signal passes; a second shunt bulk acoustic resonator, electrically shunt connected between the series bulk acoustic resonator and a ground and having a resonance frequency lower than that of the series bulk acoustic resonator; and a first shunt bulk acoustic resonator electrically connected to the second shunt bulk acoustic resonator in series and having a resonance frequency higher than that of the second shunt bulk acoustic resonator. One or both of the series bulk acoustic resonator and the first shunt bulk acoustic resonator includes a first electrode disposed above a substrate; a piezoelectric layer disposed on the first electrode; a second electrode disposed on the piezoelectric layer; and a trench formed in an upper surface or above the second electrode and recessed downwardly.

公开(公告)号：US10432172B2

公开(公告)日：2019-10-01

申请号：US15673498

申请日：2017-08-10

Applicant: Samsung Electro-Mechanics Co., Ltd.

Inventor： Jin Woo Yi ,  Chan Hee Park ,  Kwang Su Kim ,  Sang Jin Kim

IPC: H03H9/54 ,  H03H9/17 ,  H03H9/10 ,  H03H3/02 ,  H03H9/02 ,  H03H9/13

Abstract: A bulk acoustic filter device includes: a substrate including a through hole formed by a first recess and a second recess adjacent to the first recess; a membrane layer forming a cavity with the substrate; a filter including a lower electrode disposed on the membrane layer, a piezoelectric layer disposed to cover a portion of the lower electrode, and an upper electrode formed to cover a portion of the piezoelectric layer; and an electrode connecting member disposed in the substrate, and connected to either one of the lower electrode and the upper electrode, wherein the electrode connecting member includes an insertion electrode disposed in the first recess, and a via electrode connected to the insertion electrode, and disposed on an inner peripheral surface of the second recess and a surface of the substrate.

公开(公告)号：US11646716B2

公开(公告)日：2023-05-09

申请号：US17201162

申请日：2021-03-15

Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.

Inventor： Chan Hee Park ,  Sung Tae Kim ,  Jung Woo Sung

IPC: H03H9/54 ,  H03H9/60 ,  H03H9/17

CPC classification number: H03H9/542 ,  H03H9/17 ,  H03H9/605

Abstract: An acoustic resonator filter includes: a series unit including at least one series acoustic resonator electrically connected, in series, between first and second ports configured to pass a radio frequency (RF) signal; a first shunt unit disposed on a first shunt connection path between the at least one series acoustic resonator and a ground, the first shunt unit including a plurality of shunt acoustic resonators connected to each other in series and having different resonance frequencies; and a second shunt unit disposed in a second shunt connection path between the at least one series acoustic resonator and the ground, the second shunt unit including at least one shunt acoustic resonator and having higher inductance than inductance of the first shunt unit.