公开(公告)号：US09773645B2

公开(公告)日：2017-09-26

申请号：US15010151

申请日：2016-01-29

申请人： SAMSUNG ELECTRONICS CO., LTD.

发明人： Ja-woo Lee ,  Chung-huan Jeon ,  Heok-jae Lee ,  Jang-hyoun Youm ,  Sang-jean Jeon ,  Kwang-young Jung ,  Sun-uk Kim ,  Kang-ho Lee ,  Jung-hyun Cho ,  Soon-im Wi ,  Yun-sik Yang ,  Moo-jin Kim ,  Jang-kyu Choi

IPC分类号： H01J37/32 ,  H05H1/46 ,  H05H1/24

CPC分类号： H01J37/32467 ,  H01J37/321 ,  H01J37/32357 ,  H01J37/32477 ,  H01J37/32495 ,  H01J37/3266 ,  H05H1/2406 ,  H05H1/46 ,  H05H2001/2462 ,  H05H2001/4667 ,  H05H2001/4682

摘要： A remote plasma generator includes a body, a driver, and a protection tube. The body includes a gas injection port, a plasma exhaust port, and a plasma generation pipe through which discharge gas or plasma flow. The driver is coupled to the body and generates a magnetic field and plasma in the body. The protection tube is at an inner side of the plasma generation pipe to protect the plasma generation pipe from plasma.