公开(公告)号：US09645028B2

公开(公告)日：2017-05-09

申请号：US14478755

申请日：2014-09-05

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Chwee Lin Choong ,  Jongjin Park ,  Jihyun Bae ,  Byoungsun Lee ,  Jungkyun Im

IPC: G01L9/00 ,  G01L1/22

CPC classification number: G01L9/0052 ,  G01L1/2206 ,  G01L1/2293 ,  G01L2009/0069

Abstract: Provided is a pressure sensor including an elastic thin film including a first surface and a second surface that face each other, the elastic thin film including an elastomer material, a plurality of protruding deformable structures patterned on the first surface; a piezoresistive electrode formed along surfaces of the plurality of protruding deformable structures; and a counter electrode disposed to face the piezoresistive electrode.