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公开(公告)号:US10304964B2
公开(公告)日:2019-05-28
申请号:US15238059
申请日:2016-08-16
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Mongsong Liang , Sung-Dae Suk , Guemjong Bae
IPC: H01L29/786 , H01L21/8234 , H01L27/088 , H01L27/11 , H01L29/06 , H01L29/16 , H01L29/161 , H01L29/165 , H01L29/423 , H01L29/66 , H01L29/78
Abstract: A semiconductor device includes a first transistor, a second transistor and a third transistor provided on a substrate, the first to third transistors respectively including source and drain regions spaced apart from each other, a gate structure extending in a first direction on the substrate and interposed between the source and drain regions, and a channel region connecting the source and drain regions to each other. A channel region of the second transistor and a channel region of the third transistor respectively include a plurality of channel portions, the plurality of channel portions spaced apart from each other in a second direction, perpendicular to an upper surface of the substrate, and connected to the source and drain regions, respectively. A width of a channel portion of the third transistor in the first direction is greater than a width of a channel portion of the second transistor in the first direction.