公开(公告)号：US20200333701A1

公开(公告)日：2020-10-22

申请号：US16918106

申请日：2020-07-01

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Mun-Ja KIM ,  Ji-Beom YOO ,  Soo-Young KIM ,  Hee-Bom KIM ,  Hwan-Chul JEON ,  Seul-Gi KIM ,  Tae-Sung KIM ,  Dong-Wook SHIN

IPC: G03F1/64

Abstract: A method of manufacturing a pellicle includes preparing a pellicle frame having an adhesive layer coated thereon, treating a pellicle membrane with vapor under vapor atmosphere, attaching the pellicle membrane onto the pellicle frame, and drying the pellicle membrane.

公开(公告)号：US20180275508A1

公开(公告)日：2018-09-27

申请号：US15690879

申请日：2017-08-30

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Mun-Ja KIM ,  Ji-Beom YOO ,  Soo-Young KIM ,  Hee-Bom KIM ,  Hwan-Chul JEON ,  Seul-Gi KIM ,  Tae-Sung KIM ,  Dong-Wook SHIN

IPC: G03F1/64

CPC classification number: G03F1/64

Abstract: A method of manufacturing a pellicle includes preparing a pellicle frame having an adhesive layer coated thereon, treating a pellicle membrane with vapor under vapor atmosphere, attaching the pellicle membrane onto the pellicle frame, and drying the pellicle membrane.