公开(公告)号：US20160201201A1

公开(公告)日：2016-07-14

申请号：US14969645

申请日：2015-12-15

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Mun-Ja KIM ,  Tae-Sung KIM ,  Ji-Beom YOO ,  Byung-Gook KIM ,  Soo-Young KIM ,  Dong-Wook SHIN ,  Jae-Hyuck CHOI

IPC: C23F1/14

CPC classification number: G03F1/62 ,  C01B32/182 ,  C01B32/194 ,  C01B32/20 ,  C23C16/01 ,  C23C16/26 ,  C23C16/56 ,  C23F1/00 ,  C23F1/02 ,  C23F1/14 ,  G03F1/64

Abstract: A method of manufacturing a pellicle includes forming a membrane on a first surface of a substrate from a chemical reaction in which the substrate serves as a catalyst, forming a protective pattern on a second surface of the substrate, immersing the substrate in an etchant solution, such that a portion of the substrate exposed through the protective pattern is removed to form a frame, and replacing the etchant solution with a solvent.

Abstract translation: 防护薄膜组件的制造方法包括：从基板作为催化剂的化学反应在基板的第一面上形成膜，在基板的第二面上形成保护图案，将基板浸渍在蚀刻液中， 使得通过保护图案曝光的基板的一部分被去除以形成框架，并用溶剂替换蚀刻剂溶液。

公开(公告)号：US20180275508A1

公开(公告)日：2018-09-27

申请号：US15690879

申请日：2017-08-30

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Mun-Ja KIM ,  Ji-Beom YOO ,  Soo-Young KIM ,  Hee-Bom KIM ,  Hwan-Chul JEON ,  Seul-Gi KIM ,  Tae-Sung KIM ,  Dong-Wook SHIN

IPC: G03F1/64

CPC classification number: G03F1/64

Abstract: A method of manufacturing a pellicle includes preparing a pellicle frame having an adhesive layer coated thereon, treating a pellicle membrane with vapor under vapor atmosphere, attaching the pellicle membrane onto the pellicle frame, and drying the pellicle membrane.

公开(公告)号：US20200333701A1

公开(公告)日：2020-10-22

申请号：US16918106

申请日：2020-07-01

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Mun-Ja KIM ,  Ji-Beom YOO ,  Soo-Young KIM ,  Hee-Bom KIM ,  Hwan-Chul JEON ,  Seul-Gi KIM ,  Tae-Sung KIM ,  Dong-Wook SHIN

IPC: G03F1/64

Abstract: A method of manufacturing a pellicle includes preparing a pellicle frame having an adhesive layer coated thereon, treating a pellicle membrane with vapor under vapor atmosphere, attaching the pellicle membrane onto the pellicle frame, and drying the pellicle membrane.