公开(公告)号：US20200086454A1

公开(公告)日：2020-03-19

申请号：US16379186

申请日：2019-04-09

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Hui-Gwan LEE ,  Hyun-Joong KIM ,  Tae-Min EARMME ,  Kyung-Won KANG ,  Jong-Hwi SEO

IPC: B24B37/26 ,  B24B37/34

Abstract: A polishing head includes a carrier body detachably fixed to a drive shaft and having a plurality of first fluid passages penetrating therethrough to extend from an upper surface to a lower surface of the carrier body, upper end portions of the first fluid passages being arranged to be spaced apart from each other in a circumferential direction about a central axis thereof, a flexible membrane clamped to a lower portion of the carrier body to form a plurality of pressurizing chambers, wherein at least one of the pressurizing chambers is divided into a plurality of sub-chambers arranged in a circumferential direction about a central axis of the flexible membrane, the sub-chambers being in fluid communication with lower end portions of the first fluid passages respectively, and a fluid sealing part on the carrier body to support the carrier body to be rotatable and flow a fluid into each of the first fluid passages in a sealed state.