公开(公告)号：US20200086454A1

公开(公告)日：2020-03-19

申请号：US16379186

申请日：2019-04-09

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Hui-Gwan LEE ,  Hyun-Joong KIM ,  Tae-Min EARMME ,  Kyung-Won KANG ,  Jong-Hwi SEO

IPC: B24B37/26 ,  B24B37/34

Abstract: A polishing head includes a carrier body detachably fixed to a drive shaft and having a plurality of first fluid passages penetrating therethrough to extend from an upper surface to a lower surface of the carrier body, upper end portions of the first fluid passages being arranged to be spaced apart from each other in a circumferential direction about a central axis thereof, a flexible membrane clamped to a lower portion of the carrier body to form a plurality of pressurizing chambers, wherein at least one of the pressurizing chambers is divided into a plurality of sub-chambers arranged in a circumferential direction about a central axis of the flexible membrane, the sub-chambers being in fluid communication with lower end portions of the first fluid passages respectively, and a fluid sealing part on the carrier body to support the carrier body to be rotatable and flow a fluid into each of the first fluid passages in a sealed state.

公开(公告)号：US20150360373A1

公开(公告)日：2015-12-17

申请号：US14661688

申请日：2015-03-18

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sun-Ho KIM ,  Ki-Hoon NAM ,  Tae-Min EARMME ,  Seok HEO ,  Jae-Chul HWANG

IPC: B25J18/02 ,  B25J9/04

CPC classification number: B25J9/042 ,  B25J9/1065 ,  B25J9/107 ,  H01L21/67742 ,  Y10S901/15 ,  Y10T74/20305

Abstract: A link structure includes a first link, a second link having an end that is connected to an end of the first link, a third link having an end that is connected to the end of the first link, and provided on a portion of the second link, a first rotary shaft partially provided in the first link, a first actuator configured to rotate the first link about the first rotary shaft; a second rotary shaft partially provided in the second link, the second rotary shaft being different from the first rotary shaft, and a second actuator configured to rotate the second link about the second rotary shaft, the first and second actuators being provided in the first link.

Abstract translation: 连杆结构包括第一连杆，具有连接到第一连杆的端部的端部的第二连杆，具有连接到第一连杆的端部的端部的第三连杆，并且设置在第二连杆的一部分上 所述第一旋转轴部分地设置在所述第一连杆中，所述第一致动器被构造成围绕所述第一旋转轴旋转所述第一连杆; 第二旋转轴部分地设置在第二连杆中，第二旋转轴不同于第一旋转轴，第二致动器被构造成使第二连杆围绕第二旋转轴旋转，第一和第二致动器设置在第一连杆 。