公开(公告)号：US20150129132A1

公开(公告)日：2015-05-14

申请号：US14339650

申请日：2014-07-24

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Hong-Taek LIM ,  Ki-Kone KIM ,  Ho-Jun KIM ,  Jong-Yong BAE ,  Do-Hyung KIM ,  Jai-Hyung WON ,  Seung-Moo LEE

IPC: C23C16/455 ,  C23C16/46

CPC classification number: C23C16/45565

Abstract: A showerhead includes a body configured to receive a reaction gas, a nozzle on the body configured to inject the reaction gas to a substrate, and a plurality of conducting members in thermal contact with the body to conduct heat generated from the substrate.

Abstract translation: 喷头包括构造成接收反应气体的主体，构造成将反应气体注入基板的喷嘴，以及与主体热接触的多个导电构件，以传导从基板产生的热量。