CUT-MASK PATTERNING TO REMOVE CORNER- ROUNDING OF ACTIVE REGIONS OF SEMICONDUCTOR DEVICE

    公开(公告)号:US20250159986A1

    公开(公告)日:2025-05-15

    申请号:US18639141

    申请日:2024-04-18

    Abstract: Provided is a semiconductor device which includes: a 1st active region extended in a 1st direction and including: a 1st out-corner edge at which a width of the 1st active region in a 2nd direction gradually changes along the 1st direction; and a 1st in-corner edge at which the width of the 1st active region less gradually changes along the 1st direction than at the 1st out-corner edge; and a gate structure extended in the 2nd direction and overlapping the 1st out-corner edge in a 3rd direction, wherein the 1st direction horizontally intersects the 2nd direction, and the 3rd direction vertically intersects the 1st direction and the 2nd direction.

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