SEMICONDUCTOR DEVICE INCLUDING CAPACITOR STRUCTURE

    公开(公告)号:US20250089280A1

    公开(公告)日:2025-03-13

    申请号:US18809515

    申请日:2024-08-20

    Abstract: An example semiconductor device includes a capacitor structure on a substrate. The capacitor structure includes a first electrode structure, a second electrode structure, and a capacitor dielectric layer. The first electrode structure includes first horizontal electrode portions apart from each other in a first direction perpendicular to the substrate and a first conductive pillar connected to each of the first horizontal electrode portions and extending in the first direction. The second electrode structure includes a second conductive pillar extending through the first horizontal electrode portions in the first direction and second horizontal electrode portions apart from each other in the first direction on a side wall of the second conductive pillar and alternately arranged with the first horizontal electrode portions. The capacitor dielectric layer is between the side wall of the second conductive pillar and the first horizontal electrode portions.

Patent Agency Ranking