公开(公告)号：US20230109672A1

公开(公告)日：2023-04-13

申请号：US17850257

申请日：2022-06-27

申请人： SAMSUNG ELECTRONICS CO., LTD.

发明人： Changsoon Lim ,  Youngdo Kim ,  Daewon Kang ,  Chansoo Kang ,  Kyunghyun Kim ,  Sangki Nam ,  Kyunjin Lee ,  Sungho Jang ,  Jonghun Pi

IPC分类号： H01J37/32

摘要： An apparatus includes first and second VI sensors, an optical sensor, and an arcing detector. The first VI sensor is disposed in a power filter or on a power supply line connected to a heater disposed in a lower electrode of a process chamber in which a plasma process is performed. The first VI sensor senses a harmonic generated from a first power supply supplying power to the lower electrode and outputs a first signal. The optical sensor senses an intensity of light generated from the process chamber and outputs a second signal. The second VI sensor is disposed on a power supply line connected to an upper electrode and senses a harmonic generated from a second power supply supplying power to the upper electrode and outputs a third signal. The arcing detector determines whether arcing occurs based on one or more of the first, second, and third signals.