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公开(公告)号:US20230081723A1
公开(公告)日:2023-03-16
申请号:US17804742
申请日:2022-05-31
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: JU HYUNG LEE , DONG UK KWON , SUN CHUL KIM , YONG HYUN KIM , MIN JAE LEE
IPC: H01L23/00 , H01L23/31 , H01L23/538
Abstract: A method of fabricating a semiconductor package includes disposing a preliminary semiconductor package on a stage, the preliminary semiconductor package including a substrate to which a pad part is attached, an interposer disposed on the substrate, and a semiconductor chip disposed between the substrate and the interposer. A bonding tool is disposed on the interposer. The bonding tool includes a first region and a second region outside of the first region. The second region of the bonding tool corresponds to the pad part. The interposer and the substrate are bonded to each other.
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公开(公告)号:US20220157845A1
公开(公告)日:2022-05-19
申请号:US17443448
申请日:2021-07-26
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: MIN JAE LEE , Jin Do Byun , Young-Hoon Son , Young Don Choi , Pan Suk Kwak , Myung Hun Lee , Jung Hwan Choi
IPC: H01L27/11573 , H01L27/11519 , H01L27/11526 , H01L27/11556 , H01L27/11565 , H01L27/11582 , H01L23/522 , H01L23/528 , G11C16/08
Abstract: A non-volatile memory chip comprises a cell region that includes a first surface, a second surface opposite to the first surface, a first cell structure, and a second cell structure spaced apart from the first cell structure; a peripheral circuit region on the first surface of the cell region, and that includes a first peripheral circuit connected to the first cell structure, a second peripheral circuit connected to the second cell structure, and a connection circuit between the first and second peripheral circuits; a through via between the first and second cell structures and that extends from the second surface of the cell region to the connection circuit of the peripheral circuit region; a redistribution layer that covers the through via on the second surface of the cell region, is connected to the through via, and extends along the second surface; and a chip pad connected to the redistribution layer.
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