公开(公告)号：US20170052019A1

公开(公告)日：2017-02-23

申请号：US15228390

申请日：2016-08-04

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： JUNGMIN WON ,  MYOUNGHO JUNG ,  SANG-HO LEE ,  DONGYUN SONG ,  SUNGKYUNG YUN

IPC: G01B11/14 ,  G01V8/14 ,  B25J11/00 ,  G01B11/26

CPC classification number: G01V8/14 ,  G01V8/20 ,  H01L21/67259 ,  H01L21/67265 ,  H01L21/67781 ,  Y10S901/47

Abstract: An inspection apparatus includes a supporting substrate. A first sensor unit is provided on the supporting substrate, the first sensor unit comprising a first light-emitting device and a first light-receiving device which are spaced apart from each other and face each other. A second sensor unit is provided on the supporting substrate, the second sensor unit comprising a second light-emitting device and a second light-receiving device which are spaced apart from each other and face each other. The first and second light-emitting devices and the first and second light-receiving devices are disposed at a same distance from a top surface of the supporting substrate. The first and second sensor units are configured to detect whether a robot hand moves in a first direction perpendicular to the top surface of the supporting substrate.

Abstract translation: 检查装置包括支撑基板。 第一传感器单元设置在支撑基板上，第一传感器单元包括彼此间隔开并彼此面对的第一发光装置和第一光接收装置。 第二传感器单元设置在支撑基板上，第二传感器单元包括彼此间隔开并彼此面对的第二发光装置和第二光接收装置。 第一和第二发光装置以及第一和第二光接收装置设置在与支撑基板的顶表面相同的距离处。 第一和第二传感器单元被配置为检测机器人手是否沿垂直于支撑基板的顶表面的第一方向移动。