INTEGRATED CIRCUIT DEVICE
    1.
    发明公开

    公开(公告)号:US20230262962A1

    公开(公告)日:2023-08-17

    申请号:US18107589

    申请日:2023-02-09

    IPC分类号: H10B12/00

    摘要: An integrated circuit device includes a substrate having an active area, bit line structures on the substrate, the bit line structures including an insulating spacer on each sidewall thereof, a buried contact between the bit line structures, the buried contact being connected to the active area, an insulation capping pattern on each of the bit line structures, a barrier conductive layer covering side surfaces of the insulation capping pattern, and an upper surface and side surfaces of the insulating spacer, and a landing pad electrically connected to the buried contact, the landing pad vertically overlapping one of the bit line structures on the insulation capping pattern and the barrier conductive layer.