公开(公告)号：US20200081422A1

公开(公告)日：2020-03-12

申请号：US16251924

申请日：2019-01-18

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： SHASHANK SHRIKANT AGASHE ,  Sameera Bharadwaja Hayavadana ,  Byeong Eon Lee ,  Harshit Pande ,  Yune Tech Han

IPC: G05B19/418 ,  G05B23/02

Abstract: The embodiments herein disclose methods and systems for predicting health of products in a manufacturing process. A method includes determining at least one of a dynamic data and a static data of at least one product from a manufacturing process steps. Further, the method includes determining and filtering at least one of a gradual change, an abrupt change and a similar data present in the at least one of the dynamic data and the static data. Further, the method includes converting the filtered at least one of the dynamic data and the static data of the at least one product into a common data format. The common data format can be stored in a common hyperspace. Further, the method includes predicting a health of the at least one product based on the common data format and the at least one product historical health information received from an apriori computer.

公开(公告)号：US20220344220A1

公开(公告)日：2022-10-27

申请号：US17341619

申请日：2021-06-08

Applicant: Samsung Electronics Co., Ltd.

Inventor： GAURAV KUMAR ,  LAKSHMI NARAYANA PEDAPUDI ,  SAMEERA BHARADWAJA HAYAVADANA ,  SATHYANARAYANAN KULASEKARAN ,  SHASHANK SHRIKANT AGASHE ,  WAN SUNG PARK ,  SUNG HA KIM

IPC: H01L21/66 ,  G06T7/00 ,  G01B11/06 ,  H01L21/67

Abstract: Example embodiments may provide methods for determining a quality of a film in spin coating process. The methods may include capturing images of portions of the film using an imaging device while coating the film on a substrate using a spinner. The imaging device may include SPCs and lens and/or SLMs. The methods may also include determining whether a characteristic of the film matches to a standard based on the images of the portions of the film. The method may further include performing detecting that the quality of the film is optimal in response to determining that the characteristic of the film matches to the standard or detecting that the quality of the film is not optimal in response to determining that the characteristic of the film does not match to the standard.