公开(公告)号：US20170082682A1

公开(公告)日：2017-03-23

申请号：US15244780

申请日：2016-08-23

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： SOON-YOUNG LEE ,  Sang-Woo Pae

IPC: G01R31/28

CPC classification number: G01R31/002 ,  G01R31/303 ,  G01R31/31816

Abstract: A semiconductor test device includes an actuator holding a radiation source and adjusting a distance between the radiation source and a sample, and a controller controlling an operation of the actuator and calculating a soft error rate (SER) of the sample based on the distance between the radiation source and the sample. The controller calculates a first distance between the radiation source and the sample at which the SER of the sample becomes zero, and calculates a metal-to-dielectric ratio of the sample based on the first distance.