公开(公告)号：US20180073979A1

公开(公告)日：2018-03-15

申请号：US15459393

申请日：2017-03-15

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Seongkeun CHO ,  Sang-woo BAE ,  Won-don JOO ,  Sang-don JANG

IPC: G01N21/21 ,  G01N21/95 ,  G01N21/88 ,  H04N5/225 ,  H04N5/247

CPC classification number: G01N21/211 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2021/8848 ,  G01N2201/0683 ,  H04N5/2256 ,  H04N5/247

Abstract: Provided are a defect inspection system and a method of inspecting a defect, by which a defect in an inspection target may be precisely detected at a high speed. The defect inspection system includes a light source, a linear polarizer to linearly polarize light from the light source, a compensator to circularly or elliptically polarize light from the linear polarizer, a stage on which an inspection target is located, a polarization analyzer to selectively transmit light reflected by the inspection target, and a first camera to collect light from the polarization analyzer. Light transmitted through the compensator is obliquely incident to the inspection target, and reference light, which corresponds to light reflected in a defectless state, from among the light reflected by the inspection target, is blocked by the polarization analyzer.