公开(公告)号：US20240353318A1

公开(公告)日：2024-10-24

申请号：US18419244

申请日：2024-01-22

申请人： KLA Corporation

发明人： Yun Xie ,  Rui-Fang Shi ,  Xin Ye ,  Heng Zhang

IPC分类号： G01N21/21 ,  G01N21/956

CPC分类号： G01N21/21 ,  G01N21/956 ,  G01N2021/95676 ,  G01N2201/061 ,  G01N2201/0683

摘要： Methods and systems for inspecting a photomask are provided. One system includes an illumination subsystem configured to direct light to the photomask. The system also includes a pupil filter positioned in a path of only the light from the photomask and configured for controlling a polarization of the light in the path by mixing four elements in a Jones matrix for the photomask in a coherent manner. In addition, the system includes a detector configured for detecting the light from the pupil filter and generating output responsive to the detected light. The system further includes a computer subsystem configured for detecting defects on the photomask based on the output.

公开(公告)号：US20240151644A1

公开(公告)日：2024-05-09

申请号：US18283557

申请日：2022-03-30

申请人： Les instruments scientifiques affinités inc.

发明人： Ludovic LIVE ,  James WEI

IPC分类号： G01N21/552

CPC分类号： G01N21/553 ,  G01N2201/062 ,  G01N2201/0683 ,  G01N2201/08

摘要： A surface plasmon resonance (SPR) instrument is provided, in which light from one or more broad spectrum LEDs is sequentially passed through corresponding apertures directly into a Dove prism. Upon entering the Dove prism the light is refracted onto a surface of the prism against which an SPR sensor is attached, then internally reflects off the surface to a third surface of the Dove prism. Upon exiting the Dove prism the light is again refracted so as to be collinear with the emitted light. The light is collected by an optical fiber, passed through a filter, and conveyed to a detector. The wavelength-angle combination at which SPR occurs is found by using broad spectrum LEDs and a fixed angle. The use of apertures and the omission of collimating lenses allows a more compact SPR instrument than traditional SPR instruments.

公开(公告)号：US11852804B2

公开(公告)日：2023-12-26

申请号：US17214692

申请日：2021-03-26

申请人： Raytheon Company

发明人： Lacy G. Cook

IPC分类号： G02B26/10 ,  G01N21/55 ,  G02B26/08

CPC分类号： G02B26/10 ,  G01N21/55 ,  G02B26/0816 ,  G01N2201/0683

摘要： A scan mirror reflectivity calibration device is provided for monitoring and calibration of a rotating two-sided scan mirror. The scan mirror reflectivity calibration device can comprise at least one light source assembly operable to direct light onto a back side of a rotating two-sided scan mirror. The at least one light source assembly can be mounted outside a swept volume of the rotating two-sided scan mirror. The scan mirror reflectivity calibration device further comprises at least one detector assembly operable to detect light that is emitted from the at least one light source assembly and is reflected off of the back side of the rotating two-sided scan mirror. The at least one detector assembly can be mounted outside the swept volume of the rotating two-sided scan mirror.

公开(公告)号：US20190195792A1

公开(公告)日：2019-06-27

申请号：US16197056

申请日：2018-11-20

申请人： HITACHI-LG DATA STORAGE KOREA, INC.

发明人： Jaeyong RYU

IPC分类号： G01N21/53 ,  G01N21/94 ,  G01N33/00

CPC分类号： G01N21/53 ,  G01N21/94 ,  G01N33/0062 ,  G01N33/0073 ,  G01N2201/0683

摘要： The present invention provides a sensor combining a dust sensor and a gas sensor, comprising a light emitting unit for emitting light, a first light receiving unit for receiving scattered light which is emitted by the light emitting unit and scattered by dust to detect dust concentration, a mirror for changing a path of the emitted light which the light emitting unit emits, and a second light receiving unit for receiving the emitted light the path of which is changed by the mirror to detect gas concentration. An inflow section for introducing air into a detection space inside the sensor is formed in a Y-shaped tube in which a first inlet and a second inlet meet. The inflow section comprises a switch which selects a path through which air flows into the detection space out of the first inlet and the second inlet.

公开(公告)号：US20190033203A1

公开(公告)日：2019-01-31

申请号：US16147526

申请日：2018-09-28

申请人： NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY ,  NIKON CORPORATION

发明人： Yuzuru IKEHARA ,  Josaku SAKAKIMA

IPC分类号： G01N21/21 ,  G01N21/3577

CPC分类号： G01N21/21 ,  A61B5/0075 ,  A61B5/14558 ,  A61B5/4283 ,  G01N21/3577 ,  G01N2021/945 ,  G01N2201/0683

摘要： Provided is an observation apparatus that observes tissues of an organism. The observation apparatus includes a generator that generates first data obtained by irradiating the tissues with a first infrared light with a first wavelength and second data obtained by irradiating the tissues with a second infrared light with a second wavelength being different from the first infrared light in an optical property value with respect to a water, and a comparison calculator that compares the first data with the second data to generate bodily fluid data that indicates a presence of a bodily fluid on a surface of the tissues.

公开(公告)号：US20180360318A1

公开(公告)日：2018-12-20

申请号：US16015659

申请日：2018-06-22

申请人： Ivana Ledesma

发明人： RALPH ZUCKERMAN

IPC分类号： A61B5/00

CPC分类号： A61B5/0071 ,  A61B5/14546 ,  A61B5/1455 ,  A61B5/14555 ,  A61B5/14556 ,  A61B5/4842 ,  A61B5/7246 ,  A61B5/7278 ,  G01N21/6445 ,  G01N21/645 ,  G01N2021/6484 ,  G01N2201/0683 ,  G01N2201/12

摘要： A non-invasive measurement of biological tissue reveals information about the function of that tissue. Polarized light is directed onto the tissue, stimulating the emission of fluorescence, due to one or more endogenous fluorophors in the tissue. Fluorescence anisotropy is then calculated. Such measurements of fluorescence anisotropy are then used to assess the functional status of the tissue, and to identify the existence and severity of disease states. Such assessment can be made by comparing a fluorescence anisotropy profile with a known profile of a control.

公开(公告)号：US20180328837A1

公开(公告)日：2018-11-15

申请号：US16042448

申请日：2018-07-23

申请人： Nova Measuring Instruments Ltd.

发明人： Dror SHAFIR ,  Gilad BARAK ,  Shay WOLFLING ,  Michal Haim YACHINI ,  Matthew SENDELBACH ,  Cornel BOZDOG

IPC分类号： G01N21/21 ,  G01N21/47

CPC分类号： G01N21/21 ,  G01N2021/4792 ,  G01N2201/061 ,  G01N2201/0683

摘要： A method and system are presented for use in measuring on patterned samples, aimed at determining asymmetry in the pattern. A set of at least first and second measurements on a patterned region of a sample is performed, where each of the measurements comprises: directing illuminating light onto the patterned region along an illumination channel and collecting light reflected from the illuminated region propagating along a collection channel to be detected, such that detected light from the same patterned region has different polarization states which are different from polarization of the illuminating light, and generating a measured data piece indicative of the light detected in the measurement. Thus, at least first and second measured data pieces are generated for the at least first and second measurements on the same patterned region. The at least first and second measured data pieces are analyzed and output data is generated being indicative of a condition of asymmetry in the patterned region.

公开(公告)号：US20180252648A1

公开(公告)日：2018-09-06

申请号：US15904499

申请日：2018-02-26

申请人： OLYMPUS CORPORATION

发明人： Masahito DOHI

IPC分类号： G01N21/64 ,  G02B21/00 ,  G02B21/10

CPC分类号： G01N21/6458 ,  G01N2021/6463 ,  G01N2021/6478 ,  G01N2201/06113 ,  G01N2201/0683 ,  G02B5/12 ,  G02B21/0032 ,  G02B21/0048 ,  G02B21/0068 ,  G02B21/0076 ,  G02B21/008 ,  G02B21/0084 ,  G02B21/0088 ,  G02B21/10

摘要： In the present invention, cells cultured inside the wells of a microplate are observed easily and clearly regardless of the height or curvature state of the liquid surface of the culturing liquid. Provided is an observation device that includes an illumination optical system that irradiates a transparent sample with illumination light from a light source, an objective lens that collects observation light from the sample, a detection optical system that detects the observation light collected by the objective lens, and a retroreflective member that is arranged opposite the objective lens with the sample interposed therebetween and in which a plurality of very small reflective elements are arrayed. The objective lens and the illumination optical system are arranged below the sample in the direction of gravity.

公开(公告)号：US20180195965A1

公开(公告)日：2018-07-12

申请号：US15864340

申请日：2018-01-08

申请人： MKS Technology, Inc.

发明人： Keith T. Carron ,  Celestin P. Zemtsop ,  Shane A. Buller ,  Scott L. Rudder ,  Harald R. Guenther

IPC分类号： G01N21/65

CPC分类号： G01N21/65 ,  G01N2201/06113 ,  G01N2201/0683

摘要： A method of measuring Raman scattering includes exciting Raman scattering of a sample with a first wavelength and a second wavelength of electromagnetic radiation traveling along a common optical path to form a first scattered radiation and a second scattered radiation. The first wavelength reaches the sample polarized in a first direction, and the second wavelength reaches the sample polarized in a second direction perpendicular to the first direction. The method includes collecting a first Raman spectrum from the first scattered radiation, collecting a second Raman spectrum from the second scattered radiation, and forming a decomposed Raman spectrum based on the first Raman spectrum and the second Raman spectrum. The decomposed Raman spectrum may be substantially free of noise, such as fluorescence and background radiation. Related spectrometers and laser devices are disclosed.

公开(公告)号：US09927372B2

公开(公告)日：2018-03-27

申请号：US14441856

申请日：2013-11-12

申请人： FOCALSPEC OY

发明人： Karri Niemela ,  Heimo Keranen

IPC分类号： G01N21/90 ,  G01N21/95

CPC分类号： G01N21/9054 ,  G01N21/95 ,  G01N21/9508 ,  G01N2201/061 ,  G01N2201/0683

摘要： A measuring apparatus is provided for inspecting a seal of an item. The measuring apparatus includes a radiation source for providing radiation for illuminating the seal of the item, a detector for receiving radiation from the item for generating a corresponding detected signal, and a processing arrangement for processing the detected signal to generate an output signal indicative of a state of the seal. The radiation source is arranged to focus the radiation into a plurality of focal points at the seal of the item, wherein the focal points are mutually spatially spaced apart. Moreover, the detector is arranged to image one or more of the focal points and to be selectively sensitive to an intensity of radiation received from the one or more focal points to generate a detected signal.