公开(公告)号：US20230230266A1

公开(公告)日：2023-07-20

申请号：US17958784

申请日：2022-10-03

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Shashank Shrikant AGASHE ,  Gaurav KUMAR

IPC: G06T7/557 ,  G01N21/95 ,  H01L21/66

CPC classification number: G06T7/557 ,  G01N21/9501 ,  H01L22/12 ,  G06T2207/30148

Abstract: Systems and methods for brightfield inspection of a circular rotating wafer are provided. A method includes: acquiring a plurality of images of a circular wafer, that is rotating, by using a plurality of line cameras; obtaining a plurality of synchronized images, based on the plurality of images, by synchronizing a motion of the circular wafer, that is rotating, with at least one line camera from among the plurality of line cameras; obtaining a single wafer map by integrating together the plurality of synchronized images; obtaining an in-focus image of the single wafer map while the circular wafer is moving; and performing brightfield inspection of the circular wafer based on the in-focus image of the single wafer map.

公开(公告)号：US20220163467A1

公开(公告)日：2022-05-26

申请号：US17185559

申请日：2021-02-25

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Shashank Shrikant AGASHE ,  Gaurav KUMAR ,  Priya Ranjan SINHA ,  Lakshmi Narayana PEDAPUDI ,  Avadhut Dipakrao CHAUDHARI ,  Dongwoo LEE ,  Taehyoung LEE

IPC: G01N23/2273 ,  G01N23/2251

Abstract: Provided is a method for virtually executing an operation of an energy dispersive x-ray spectrometry (EDS) system in real time production line by analyzing a defect included in a material undergoing inspection based on computer vision, the method including receiving a scanning electron microscope (SEM) image of the material including the defect, extracting an image-feature from the SEM image of the material; classifying the extracted image-feature under a predetermined label, predicting, based on the classified image-feature, an element associated with the defect included in the material and a shape of the predicted element, and grading the defect included in the material based on comparing the predicted element with a predetermined criteria.

公开(公告)号：US20170061603A1

公开(公告)日：2017-03-02

申请号：US15078314

申请日：2016-03-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Shashank Shrikant AGASHE ,  Gaurav KUMAR

IPC: G06T7/00 ,  G06K9/62 ,  G06K9/52 ,  H04N5/265 ,  H04N5/232 ,  G06K9/46

Abstract: The present inventive concepts discloses methods, apparatuses, and/or systems for enabling spatially varying auto focusing of one or more objects using an image capturing system. The methods, apparatuses, and/or systems may include focusing objects in a region of interest using lenses, enabling spatially varying auto focusing of objects in the region of interest using a spatial light modulators (SLM), which are out of focus in the region of interest, and capturing the focused and the auto focused objects in the region of interest using a camera sensor.

Abstract translation: 本发明的概念公开了使用图像捕获系统实现一个或多个物体的空间变化的自动聚焦的方法，装置和/或系统。 方法，装置和/或系统可以包括使用透镜聚焦在感兴趣区域中的物体，从而可以利用空间光调制器（SLM）在区域中进行空间变化的自动聚焦，所述空间光调制器（SLM）在该区域中不重点 感兴趣的，并且使用相机传感器捕获感兴趣区域中的聚焦和自动聚焦对象。