公开(公告)号：US20230074302A1

公开(公告)日：2023-03-09

申请号：US17826320

申请日：2022-05-27

Applicant: Samsung Electronics Co., Ltd.

Inventor： Yunje CHO ,  Subong SHON ,  Myungjun LEE ,  Taehyoung LEE ,  Yeny YIM

IPC: G06T7/00 ,  G06V10/77 ,  G06T7/73 ,  G06T1/20

Abstract: A scanning electron microscope (SEM) device includes: an electron beam source configured to emit an electron beam; a lens unit disposed between the electron beam source and a stage configured to seat an object including structures having a pattern is seated, and including a scanning coil, the scanning coil configured to generate an electromagnetic field to provide a lens, and an astigmatism adjuster; and a control unit. The control unit is configured to change a working distance between the lens unit and the object to obtain a plurality of original images, obtain a pattern image, in which the structures appear, and a plurality of kernel images, in which a distribution of the electron beam on the object appears, from the plurality of original images, and control the astigmatism adjuster to adjust the focus and the astigmatism of the lens unit using feature values extracted from the plurality of kernel images.

公开(公告)号：US20230064941A1

公开(公告)日：2023-03-02

申请号：US17713541

申请日：2022-04-05

Applicant: Samsung Electronics Co., Ltd.

Inventor： Taehyoung LEE ,  Hohyun LEE ,  Jongmin SONG ,  Young YOON ,  Jaemoo CHOI

IPC: H01L21/683 ,  B25J9/16 ,  H01L21/677 ,  H01L21/67

Abstract: A teaching apparatus includes a chamber; an electrostatic chuck in the chamber, the electrostatic chuck including a sidewall surrounding a loading area; an aligner configured to be loaded onto the loading area of the electrostatic chuck; a vision sensor configured to obtain measurement data by measuring separation distances of separation regions between the aligner and the sidewall of the electrostatic chuck and to transmit the measurement data; a transfer robot configured to load the aligner onto a reference position of the loading area and to position the vision sensor above the electrostatic chuck; and controller configured to reset the reference position and to equalize the separation distances based on the measurement data transmitted from the vision sensor.

公开(公告)号：US20220163467A1

公开(公告)日：2022-05-26

申请号：US17185559

申请日：2021-02-25

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Shashank Shrikant AGASHE ,  Gaurav KUMAR ,  Priya Ranjan SINHA ,  Lakshmi Narayana PEDAPUDI ,  Avadhut Dipakrao CHAUDHARI ,  Dongwoo LEE ,  Taehyoung LEE

IPC: G01N23/2273 ,  G01N23/2251

Abstract: Provided is a method for virtually executing an operation of an energy dispersive x-ray spectrometry (EDS) system in real time production line by analyzing a defect included in a material undergoing inspection based on computer vision, the method including receiving a scanning electron microscope (SEM) image of the material including the defect, extracting an image-feature from the SEM image of the material; classifying the extracted image-feature under a predetermined label, predicting, based on the classified image-feature, an element associated with the defect included in the material and a shape of the predicted element, and grading the defect included in the material based on comparing the predicted element with a predetermined criteria.