公开(公告)号：US20200020506A1

公开(公告)日：2020-01-16

申请号：US16257895

申请日：2019-01-25

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sung-Bo Shim ,  Il-Gyou Shin ,  Seon-Young Lee ,  Alexander Schmidt ,  Shin-Wook Yi

IPC: H01J37/26 ,  G01N23/20058

Abstract: A system of analyzing a crystal defect includes an image processor, an image generator, and a comparator. The image processor processes a measured transmission electron microscope (TEM) image that is provided by capturing an image of a specimen having a crystal structure, to provide structural defect information of the specimen. The image generator provides a plurality of virtual TEM images corresponding to a plurality of three-dimensional structural defects of the crystal structure. The comparator compares the measured TEM image with the plurality of virtual TEM images using the structural defect information to determine a defect type of the measured TEM image.

公开(公告)号：US10727025B2

公开(公告)日：2020-07-28

申请号：US16257895

申请日：2019-01-25

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sung-Bo Shim ,  Il-Gyou Shin ,  Seon-Young Lee ,  Alexander Schmidt ,  Shin-Wook Yi

IPC: H01J37/26 ,  G01N23/20058

Abstract: A system of analyzing a crystal defect includes an image processor, an image generator, and a comparator. The image processor processes a measured transmission electron microscope (TEM) image that is provided by capturing an image of a specimen having a crystal structure, to provide structural defect information of the specimen. The image generator provides a plurality of virtual TEM images corresponding to a plurality of three-dimensional structural defects of the crystal structure. The comparator compares the measured TEM image with the plurality of virtual TEM images using the structural defect information to determine a defect type of the measured TEM image.