公开(公告)号：US20040231584A1

公开(公告)日：2004-11-25

申请号：US10797579

申请日：2004-03-11

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Eun-sung Lee ,  Sung-hoon Choa ,  Min-seog Choi

IPC: B05C013/00

CPC classification number: H01L21/6715

Abstract: A spin coating apparatus for coating photoresist has a spin chuck and a nozzle part. The spin chuck has a mount part on which a wafer is mounted and an extended projection part on which edge-bead is formed. The nozzle part is for depositing photoresist onto the wafer mounted on the mount part of the spin chuck. By using the spin coating apparatus, edge-bead is formed on the extended projection part, and not on the wafer.

Abstract translation: 用于涂覆光致抗蚀剂的旋涂装置具有旋转卡盘和喷嘴部分。 旋转卡盘具有其上安装有晶片的安装部分和形成有边缘珠的延伸突起部分。 喷嘴部分用于将光致抗蚀剂沉积到安装在旋转卡盘的安装部分上的晶片上。 通过使用旋涂装置，在延伸的突出部分上而不是在晶片上形成边缘珠。

公开(公告)号：US20020040891A1

公开(公告)日：2002-04-11

申请号：US09955061

申请日：2001-09-19

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Soon-kyo Hong ,  Chul-woo Lee ,  Seung-tae Jung ,  Sung-hoon Choa

IPC: B23H005/00 ,  B23H009/00 ,  B23K009/00 ,  G11B033/14

CPC classification number: G11B33/08 ,  B23K26/0823 ,  B23K26/1462 ,  Y10T29/49025 ,  Y10T29/49036 ,  Y10T29/53165

Abstract: A disc balancing device and a method thereof. The disc balancing device includes a disc assembly having a driving source, and a disc rotatably disposed at the driving source, a displacement measurement unit measuring vibration in the rotation of the disc assembly, a phase angle measurement unit measuring a phase angle from a reference point of the disc assembly in the rotation of the disc assembly, an operation/control unit calculating an eccentric mass and an eccentric position of the disc assembly, by using the biased vibration measured in the displacement measurement unit and the phase angle measured in the phase angle measurement unit, and a laser cutter tracking and laser-cutting the side portion of the disc corresponding to the eccentric position according to the information from the operation/control unit, whereby the eccentric mass of the disc assembly is balanced to reduce vibration in the rotation.

Abstract translation: 一种光盘平衡装置及其方法。 盘平衡装置包括具有驱动源的盘组件和可旋转地设置在驱动源处的盘，测量盘组件的旋转中的振动的位移测量单元，相位角测量单元，其从参考点 通过使用在位移测量单元中测量的偏置振动和在相位角测量的相位角来计算盘组件的偏心质量和偏心位置的操作/控制单元 测量单元和激光切割器根据来自操作/控制单元的信息跟踪和激光切割对应于偏心位置的盘的侧部，由此平衡盘组件的偏心质量以减少旋转中的振动 。