公开(公告)号：US10748910B2

公开(公告)日：2020-08-18

申请号：US16053315

申请日：2018-08-02

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Chan-Sic Yoon ,  Dongoh Kim ,  Kiseok Lee ,  Sunghak Cho ,  Jemin Park

IPC: H01L27/108 ,  H01L21/762 ,  H01L21/311

Abstract: A semiconductor device includes a substrate that includes a cell region and a peripheral circuit region, a cell insulating pattern disposed in the cell region of the substrate that defines a cell active region, and a peripheral insulating pattern disposed in the peripheral circuit region of the substrate that defines a peripheral active region. The peripheral insulating pattern includes a first peripheral insulating pattern having a first width and a second peripheral insulating pattern having a second width greater than the first width. A topmost surface of at least one of the first peripheral insulating pattern and the second peripheral insulating pattern is positioned higher than a topmost surface of the cell insulating pattern.

公开(公告)号：US20200350319A1

公开(公告)日：2020-11-05

申请号：US16934874

申请日：2020-07-21

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： CHAN-SIC YOON ,  Dongoh Kim ,  Kiseok Lee ,  Sunghak Cho ,  Jemin Park

IPC: H01L27/108 ,  H01L21/762

Abstract: A semiconductor device includes a substrate that includes a cell region and a peripheral circuit region, a cell insulating pattern disposed in the cell region of the substrate that defines a cell active region, and a peripheral insulating pattern disposed in the peripheral circuit region of the substrate that defines a peripheral active region. The peripheral insulating pattern includes a first peripheral insulating pattern having a first width and a second peripheral insulating pattern having a second width greater than the first width. A topmost surface of at least one of the first peripheral insulating pattern and the second peripheral insulating pattern is positioned higher than a topmost surface of the cell insulating pattern.

公开(公告)号：US20190214391A1

公开(公告)日：2019-07-11

申请号：US16053315

申请日：2018-08-02

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Chan-Sic Yoon ,  Dongoh Kim ,  Kiseok Lee ,  Sunghak Cho ,  Jemin Park

IPC: H01L27/108 ,  H01L21/762

Abstract: A semiconductor device includes a substrate that includes a cell region and a peripheral circuit region, a cell insulating pattern disposed in the cell region of the substrate that defines a cell active region, and a peripheral insulating pattern disposed in the peripheral circuit region of the substrate that defines a peripheral active region. The peripheral insulating pattern includes a first peripheral insulating pattern having a first width and a second peripheral insulating pattern having a second width greater than the first width. A topmost surface of at least one of the first peripheral insulating pattern and the second peripheral insulating pattern is positioned higher than a topmost surface of the cell insulating pattern.

公开(公告)号：US11201156B2

公开(公告)日：2021-12-14

申请号：US16934874

申请日：2020-07-21

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Chan-Sic Yoon ,  Dongoh Kim ,  Kiseok Lee ,  Sunghak Cho ,  Jemin Park

IPC: H01L27/108 ,  H01L21/762 ,  H01L21/311

Abstract: A semiconductor device includes a substrate that includes a cell region and a peripheral circuit region, a cell insulating pattern disposed in the cell region of the substrate that defines a cell active region, and a peripheral insulating pattern disposed in the peripheral circuit region of the substrate that defines a peripheral active region. The peripheral insulating pattern includes a first peripheral insulating pattern having a first width and a second peripheral insulating pattern having a second width greater than the first width. A topmost surface of at least one of the first peripheral insulating pattern and the second peripheral insulating pattern is positioned higher than a topmost surface of the cell insulating pattern.