公开(公告)号：US20230197419A1

公开(公告)日：2023-06-22

申请号：US17969379

申请日：2022-10-19

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sungki LEE ,  Jonggun YOON ,  Sungkyu CHOI

IPC: H01J37/32 ,  H01L21/687

CPC classification number: H01J37/32642 ,  H01L21/68742

Abstract: A ring assembly includes: an outer insulating ring on an upper outer periphery of a substrate stage; an edge ring on the outer insulating ring around a wafer seated on the substrate stage; and a shadow ring on the outer insulating ring and the edge ring to be movable up and down within a predetermined stroke range and to cover an edge region of the wafer. An upper surface of the edge ring is located higher than an upper surface of the wafer by a predetermined height. The shadow ring includes an annular body portion, and a recess in a bottom surface of the body portion to receive at least a portion of a protruding upper portion of the edge ring. The shadow ring is spaced apart from the outer insulating ring and the edge ring by a predetermined distance to form a flow path for gas flow therebetween.

公开(公告)号：US20160378311A1

公开(公告)日：2016-12-29

申请号：US15182895

申请日：2016-06-15

Applicant: Samsung Electronics Co., Ltd.

Inventor： Han-Jib KIM ,  Sungkyu CHOI ,  Jeongheon KIM ,  Yongjoon JEON

IPC: G06F3/0484 ,  G06F3/0482 ,  G06F3/0488

CPC classification number: G06F3/04845 ,  G06F3/04817 ,  G06F3/0482 ,  G06F3/0484 ,  G06F3/04883

Abstract: A device for outputting a state change effect based on an attribute of an object in an electronic device and a method thereof are provided. The electronic device includes a touch screen display, a processor electrically connected to the touch screen display, and a memory electrically connected to the processor. The memory may store instructions enabling the processor to display a lock screen including a first object and a second object on the touch screen display, to receive a touch or a gesture input related to the first object or the second object through the touch screen display, to display a first visual effect on the screen when the processor receives an input related to the first object, and to display a second visual effect on the screen when the processor receives an input related to the second object, when the instructions are executed.

Abstract translation: 提供一种用于基于电子设备中的对象的属性输出状态改变效果的装置及其方法。 电子设备包括触摸屏显示器，电连接到触摸屏显示器的处理器和电连接到处理器的存储器。 存储器可以存储使得处理器能够在触摸屏显示器上显示包括第一对象和第二对象的锁定屏幕的指令，以通过触摸屏显示接收与第一对象或第二对象相关的触摸或手势输入， 当处理器接收到与第一对象相关的输入时，在屏幕上显示第一视觉效果，并且当处理器接收到与第二对象相关的输入时，当在执行指令时，在屏幕上显示第二视觉效果。