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公开(公告)号:US20140008705A1
公开(公告)日:2014-01-09
申请号:US13835669
申请日:2013-03-15
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Joon- Young Choi , Kyung-Ho Lee , Sang-Jun Choi , Tae-Hyoung Koo , Sam-Jong Choi
CPC classification number: H01L29/7827 , H01L27/14609 , H01L27/1463 , H01L27/1464 , H01L27/14645 , H01L27/14689 , H01L29/045
Abstract: A semiconductor device includes field regions formed in a substrate, and n-type impurity regions disposed between the field regions. At least one of the side surfaces of the field regions has a {100}, {310}, or {311} plane.
Abstract translation: 半导体器件包括形成在衬底中的场区域和设置在场区域之间的n型杂质区域。 场区域的至少一个侧面具有{100},{310}或{311}平面。