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公开(公告)号:US11097211B2
公开(公告)日:2021-08-24
申请号:US16567052
申请日:2019-09-11
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Taehoi Park , Sangjin Kim , Nakhee Seong , Woojeong Shin , Taehwan Oh , Kwangsub Yoon
Abstract: A resist coating apparatus including a resist supplying system; a resist filtering system having a first filter, a second filter, and a pump between the first filter and the second filter; and a resist dispensing system, wherein the first filter includes a plurality of first unit filters connected in parallel.