公开(公告)号：US11097211B2

公开(公告)日：2021-08-24

申请号：US16567052

申请日：2019-09-11

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Taehoi Park ,  Sangjin Kim ,  Nakhee Seong ,  Woojeong Shin ,  Taehwan Oh ,  Kwangsub Yoon

IPC: B01D35/26 ,  B01D36/00 ,  G03F7/16

Abstract: A resist coating apparatus including a resist supplying system; a resist filtering system having a first filter, a second filter, and a pump between the first filter and the second filter; and a resist dispensing system, wherein the first filter includes a plurality of first unit filters connected in parallel.