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公开(公告)号:US20230102201A1
公开(公告)日:2023-03-30
申请号:US17874475
申请日:2022-07-27
发明人: Vladimir Vsevolodovich PROTOPOPOV , Vasily Grigorievich PASHKOVSKIY , Chansoo KANG , Youngdo KIM , Hoonseop KIM , Sangki NAM , Sejin OH , Changsoon LIM
IPC分类号: H01J37/32
摘要: A device for measuring a density of plasma is provided. The device includes a first sensor configured to measure a microwave spectrum of an input port reflection parameter of plasma, the first sensor having a probe including a conductive material and a flat plate shape, and a second sensor configured to measure an optical signal generated from the plasma, the second sensor being configured to detect the optical signal through the probe of the first sensor.