公开(公告)号：US20140325772A1

公开(公告)日：2014-11-06

申请号：US14193394

申请日：2014-02-28

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Chol-Min JHON ,  Ho-Hyung JUNG ,  Sung-Sick AN ,  Yong-Chul LEE ,  Mi-Jung JEON

IPC: H01L21/677 ,  H01L21/673

CPC classification number: H01L21/67772 ,  H01L21/67028 ,  H01L21/67253 ,  H01L21/67775

Abstract: A load port module includes a plate to support at least one substrate, a sensor to detect foreign matter at a predetermined location, and a cleaner to remove the foreign matter at the predetermined location when the foreign matter is detected by the sensor. The cleaner removes the foreign matter at the predetermined location in synchronism with movement of the plate. A mover to move the plate continues to operate after detection of the foreign matter by the sensor and removal of the foreign matter by the cleaner.

Abstract translation: 负载端口模块包括用于支撑至少一个基板的板，用于检测预定位置处的异物的传感器，以及当由传感器检测到异物时在清除器上移除异物的清洁器。 清洁剂与板的运动同步地在预定位置处除去异物。 通过传感器检测异物和清洁剂除去异物后，移动板的移动器继续运行。