DUAL VERTICAL GATE AND IMAGE SENSOR INCLUDING THE SAME

    公开(公告)号:US20230022805A1

    公开(公告)日:2023-01-26

    申请号:US17657010

    申请日:2022-03-29

    Abstract: An image sensor includes a dual vertical gate. The dual vertical gate includes two vertical extension portions that are spaced apart from each other in a first direction and vertically extend in a second direction perpendicular to the first direction into a substrate, and a connection portion that connects the two vertical extension portions to each other. An element isolation layer is disposed adjacent to a side surface of the vertical extension portion in the first direction. The two vertical extension portions are separated by a separation area that extends in the second direction, and a top surface of the separation area is lower than a top surface of the element isolation layer.

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