SUBSTRATE ANALYSIS APPARATUS AND SUBSTRATE ANALYSIS METHOD

    公开(公告)号:US20230067060A1

    公开(公告)日:2023-03-02

    申请号:US17690317

    申请日:2022-03-09

    Abstract: A substrate analysis apparatus is provided. The substrate analysis includes: an interlayer conveying module configured to transport a first FOUP; an exchange module which is connected to the interlayer conveying module, and configured to transfer a wafer from the first FOUP to a second FOUP; a pre-processing module configured to form a test wafer piece using the wafer inside the second FOUP; an analysis module configured to analyze the test wafer piece; and a transfer rail configured to transport the second FOUP containing the wafer and a tray containing the test wafer piece. The wafer includes a first identifier indicating information corresponding to the wafer, the test wafer piece includes a second identifier indicating information generated by the pre-processing module which corresponds to the test wafer piece, and the analysis module is configured to analyze the first identifier and the second identifier in connection with each other.

    SEMICONDUCTOR DEVICE
    3.
    发明申请

    公开(公告)号:US20230122548A1

    公开(公告)日:2023-04-20

    申请号:US17885831

    申请日:2022-08-11

    Abstract: A semiconductor device is provided. The semiconductor device comprises an output terminal from which an output voltage is output, a switching converter configured to control the output voltage on the basis of a first reference voltage, a load capacitor configured to be charged with a voltage corresponding to the output voltage, a linear amplifier connected to one end of an alternating current (AC) coupling capacitor and configured to control a voltage of the AC coupling capacitor on the basis of a second reference voltage, and a switching circuit configured to control a charging speed of the load capacitor and control a connection between the output terminal and one end and another end of the AC coupling capacitor.

    POWER NOISE FILTER AND SUPPLY MODULATOR INCLUDING THE SAME

    公开(公告)号:US20230006543A1

    公开(公告)日:2023-01-05

    申请号:US17658317

    申请日:2022-04-07

    Abstract: A power noise filter and a supply modulator including the same, and a wireless communication device including the power noise filter are provided. The power noise filter includes a band stop filter and a low pass filter. The band stop filter includes an inductor and a first capacitor, which are connected in parallel between first and second nodes. The first node receives a first voltage, which is filtered by the band pass filter to thereby generate a second voltage at the second node. The first low pass filter includes the inductor and a second capacitor, which has one end connected to the second node and an opposite end connected to a ground source.

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