公开(公告)号：US20160025772A1

公开(公告)日：2016-01-28

申请号：US14873839

申请日：2015-10-02

Applicant: SEAGATE TECHNOLOGY LLC

Inventor： Lin Zhou ,  Huiwen Liu ,  Dale Egbert ,  Jonathan A. Nelson ,  Jianxin Zhu

IPC: G01Q40/00 ,  G01Q30/06

CPC classification number: G01Q40/00 ,  B82Y35/00 ,  G01Q30/06

Abstract: Apparatus and associated method that contemplates performing a first atomic force microscope (AFM) scan of a first region of a sample centered at a first position at a first angle to produce a first scan image, the first AFM scan including a first component scan at a first speed and a second component scan at a second speed; performing a second AFM scan of the first region of the sample at a second angle to produce a second scan image, the second AFM scan including performing a third component scan at the first speed and a fourth component scan at the second speed; and correcting a first error in the first scan image based on the second scan image to produce a corrected image output.

Abstract translation: 一种设备和相关方法，其考虑以第一角度执行以第一位置为中心的样本的第一区域的第一原子力显微镜（AFM）扫描，以产生第一扫描图像，所述第一AFM扫描包括在 第一速度和第二分量以第二速度扫描; 以第二角度执行样本的第一区域的第二AFM扫描以产生第二扫描图像，所述第二AFM扫描包括以第一速度执行第三分量扫描和以第二速度执行第四分量扫描; 以及基于所述第二扫描图像校正所述第一扫描图像中的第一误差，以产生校正图像输出。

公开(公告)号：US10126326B2

公开(公告)日：2018-11-13

申请号：US14873839

申请日：2015-10-02

Applicant: SEAGATE TECHNOLOGY LLC

Inventor： Lin Zhou ,  Huiwen Liu ,  Dale Egbert ,  Jonathan A. Nelson ,  Jianxin Zhu

IPC: G01Q40/00 ,  B82Y35/00 ,  G01Q30/06

Abstract: Apparatus and associated method that contemplates performing a first atomic force microscope (AFM) scan of a first region of a sample centered at a first position at a first angle to produce a first scan image, the first AFM scan including a first component scan at a first speed and a second component scan at a second speed; performing a second AFM scan of the first region of the sample at a second angle to produce a second scan image, the second AFM scan including performing a third component scan at the first speed and a fourth component scan at the second speed; and correcting a first error in the first scan image based on the second scan image to produce a corrected image output.