公开(公告)号：US20040209000A1

公开(公告)日：2004-10-21

申请号：US10842472

申请日：2004-05-11

Applicant: SEAGATE TECHNOLOGY LLC

Inventor： Donald Everett Curtiss ,  Joseph Leigh ,  Frank Quan

IPC: B05D001/18 ,  B05C003/00

CPC classification number: H01L21/6715 ,  B05C3/04 ,  B05C3/09 ,  G03F7/16

Abstract: A method of performing dip coating of a layer of a resist material on a surface of a substrate, comprising steps of: (a) providing a dip coating vessel having an interior space containing a dip coating liquid comprising a solution of the resist material in a solvent, the dip coating vessel being open at the top thereof; (b) providing a substrate having a surface, immersing the substrate in the dip coating liquid in the vessel via the open top, and withdrawing the substrate from the vessel via the open top thereof, thereby forming a layer of resist material on the surface; and (c) monitoring and maintaining the viscosity of the dip coating liquid supplied to the dip coating vessel at a predetermined value. Also disclosed is an apparatus for performing the method.

Abstract translation: 一种在衬底的表面上进行抗蚀剂材料层的浸涂的方法，包括以下步骤：（a）提供一种浸渍涂布容器，该浸渍涂布容器具有内部空间，该内部空间含有包含抗蚀剂材料溶液的浸涂液 溶剂，浸涂装置在其顶部开口; （b）提供具有表面的基材，经由开口顶部将基材浸渍在容器中的浸渍涂布液中，并通过其开口顶部将容器从容器中取出，从而在表面上形成抗蚀剂材料层; 和（c）以预定值监测和维持供应到浸涂机的浸涂液的粘度。 还公开了一种用于执行该方法的装置。