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公开(公告)号:US20220194107A1
公开(公告)日:2022-06-23
申请号:US17544961
申请日:2021-12-08
Applicant: SEMES CO., LTD.
Inventor: Bo Ram Chan SUNG , Dong Yun LEE , Eon Seok LEE
Abstract: A position measuring device and a position measuring method for accurately measuring a position of a movable member using a plurality of linear scales are provided. The position measuring device comprises a first linear scale elongated in a first direction, a second linear scale elongated in the first direction and separated from the first linear scale, and a head structure including a first scale head and a second scale head that are spaced apart from each other, wherein the head structure reads the first linear scale or the second linear scale while moving in the first direction, wherein the first scale head and the second scale head are activated or deactivated opposite to each other.