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公开(公告)号：US12276684B2
公开(公告)日：2025-04-15
申请号：US17992972
申请日：2022-11-23
Applicant: SEMES CO., LTD.
Inventor： Tae Hoon Jo , Hyo Seong Seong , Ji Hyun Kim , Ja Myung Gu
IPC: G01R27/16
Abstract: Proposed are a method and an apparatus for determining a cable length for plasma processing equipment. More particularly, proposed is a method of determining a length of a power supply cable for plasma processing equipment that performs plasma processing through power supply at radio frequencies (RF) of several tens of MHz or more.
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