公开(公告)号：US20240174440A1

公开(公告)日：2024-05-30

申请号：US18494055

申请日：2023-10-25

Applicant: SEMES CO., LTD.

Inventor： Kisub YOON ,  Jiyoon JUNG

IPC: B65G1/04 ,  B61L3/00

CPC classification number: B65G1/0457 ,  B61L3/008 ,  B65G2201/0297

Abstract: A substrate transfer apparatus includes a traveling rail including a straight section and a curved section, a raceway structure disposed on the traveling rail and configured to fix the traveling rail, a traveling device including a traveling wheel configured to travel on the traveling rail so as to transfer a substrate, a first sensor connected to the raceway structure and configured to recognize the traveling device, at least one second sensor connected to the raceway structure and configured to recognize the traveling device, and a third sensor connected to the traveling rail and configured to recognize the traveling device, wherein the at least one second sensor and the third sensor are configured to move in a traveling direction of the traveling device.