公开(公告)号：US20220167462A1

公开(公告)日：2022-05-26

申请号：US17534329

申请日：2021-11-23

Applicant: SEMES CO., LTD.

Inventor： CHUNG WOO LEE ,  IN KYU PARK ,  YONG SEOK JANG ,  SUNG YOUN JEON

IPC: H05B1/02 ,  H01J37/32

Abstract: A support unit may include a plurality of heaters disposed in a matrix form in the support unit to heat a substrate, and a power supply unit for supplying power to the plurality of heaters, wherein a current applied to the plurality of heaters is controlled by switches connected to rows and columns of the matrix, respectively, and the switches connected to the rows of the matrix include first switches capable of controlling the current applied to the rows of the matrix and second switches connected in parallel with the first switches.

公开(公告)号：US20220137212A1

公开(公告)日：2022-05-05

申请号：US17520262

申请日：2021-11-05

Applicant: SEMES CO., LTD.

Inventor： YONG SEOK JANG

IPC: G01S17/08 ,  G01S7/481 ,  G02B27/10 ,  G02B6/36

Abstract: According to an exemplary embodiment of the present invention, a system for measuring a distance is disclosed. The system includes: an LED light source configured to apply light to a target of which a distance is desired to be measured; a first splitter configured to partially reflect light applied from the LED light source; optical fiber configured to apply light passing through the first splitter to the target; and a second splitter configured to reflect light reflected from the target, and the system may further include: a first sensor configured to sense light reflected from the first splitter; and a second sensor configured to sense light reflected from the second splitter.