公开(公告)号：US20240021455A1

公开(公告)日：2024-01-18

申请号：US18222305

申请日：2023-07-14

Applicant: SEMES CO., LTD.

Inventor： Tae Uk PARK ,  Hyun Joon YOON ,  You Seung So

IPC: H01L21/677

CPC classification number: H01L21/6773 ,  H01L21/67733

Abstract: A semiconductor line logistics processing system and method are provided. A semiconductor line logistics processing method includes selecting a first line facility including a first control module for logistics transfer within a semiconductor line; interlocking a second line facility including a second control module for the logistics transfer with the first line facility; and performing the logistics transfer by the OHT unit between the first line facility and the second line facility, wherein the OHT unit is operated in an auto routing method under the control of the main control unit for logistics transfer in a direct method between the first line facility and the second line facility.