专利检索 ap:("SEMES CO., LTD." OR "Daekhon International Inc.") AND inv:"Seungwhan SUH" 第 1 页

1.

发明公开
TOWER LIFT AND SEMICONDUCTOR TRANSFER APPARATUS INCLUDING THE SAME 审中-公开

公开(公告)号：US20240213069A1

公开(公告)日：2024-06-27

申请号：US18528362

申请日：2023-12-04

申请人： SEMES CO., LTD. , Daekhon International Inc.

发明人： Nahyun LEE , Myungjin LEE , Jongsuk CHOI , Eunsang YOON , Seungwhan SUH , Junghag CHA , Sungjin LIM , Jinkwan HEO

IPC分类号： H01L21/677 , B65G49/06

CPC分类号： H01L21/67709 , B65G49/061 , H01L21/6773 , B65G2201/0297

摘要： Provided is a tower lift including a frame extending in a vertical direction, a carriage configured to move along the frame, a first coil arranged on a first surface of the frame, the first surface facing the carriage, a second coil arranged on the first surface of the frame and separated from the first coil, a first magnet connected to the carriage and located between the first coil and the second coil, and a second magnet connected to the carriage, located between the first magnet and the second coil, and separated from the first magnet.