公开(公告)号：US20220297169A1

公开(公告)日：2022-09-22

申请号：US17694828

申请日：2022-03-15

Applicant: SEMES Co., Ltd.

Inventor： Gun Min Lee ,  Do Gyeong Ha ,  Moon Soon Choi ,  Chae Young Lim ,  Jae Hyeok Yu

IPC: B08B13/00 ,  H01L21/67 ,  B08B3/08 ,  B08B3/10

Abstract: Provided are a treating liquid providing unit capable of predicting a temperature change of a substrate treating liquid by adding an inflow amount or consumption amount of the substrate treating liquid as a control factor, and a substrate treating apparatus including the same. The treating liquid providing unit includes a treating liquid storage module for storing the substrate treating liquid, a treating liquid heating module for heating the substrate treating liquid, a treating liquid discharging module for discharging the substrate treating liquid, a treating liquid supplying module for supplying the substrate treating liquid to the treating liquid storage module when the substrate treating liquid is discharged, and a control module for predicting the temperature of the substrate treating liquid remaining in the treating liquid storage module based on the inflow amount of the substrate treating liquid.