公开(公告)号：US20010022188A1

公开(公告)日：2001-09-20

申请号：US09862752

申请日：2001-05-22

Applicant: SEMITOOL, INC.

Inventor： Jeffry A. Davis ,  Kevin P. Meyer ,  Kert L. Dolechek

IPC: B08B003/04

CPC classification number: H01L21/68707 ,  A01G18/64 ,  H01L21/67742 ,  H01L21/67754 ,  H01L21/67769 ,  H01L21/67772 ,  H01L21/67775 ,  H01L21/67781 ,  Y10S134/902

Abstract: An automated semiconductor processing system has an indexer bay perpendicularly aligned with a process bay within a clean air enclosure. An indexer in the indexer bay provides stocking or storage for work in progress semiconductor wafers. Process chambers are located in the process bay. A process robot moves between the indexer bay and process bay to carry semi-conductor wafers to and from the process chambers. The process robot has a robot arm vertically moveable along a lift rail. Semiconductor wafers are carried offset from the robot arm, to better avoid contamination. The automated system is compact and requires less clean room floor space.